Characteristics of PVD coating of vacuum coater

Characteristics of PVD coating of vacuum coater

Multi-arc coating and magnetron sputtering coating have their own advantages and disadvantages. In order to exert their respective advantages as much as possible and achieve complementarity, a coating machine that combines multi-arc technology and magnetron technology emerges as the times require. In the process, there is a new method of multi-arc plating primer, then using magnetron sputtering to thicken the coating, and finally using multi-arc plating to achieve the final stable surface coating color.

Around the mid-to-late 1980s, hot cathode electron gun evaporation ion plating and hot cathode arc magnetron plasma coating machine appeared, and the application effect was very good, so that TiN coating tools were quickly popularized. Among them, the hot cathode electron gun is used to evaporate ion plating, the copper crucible is used to heat and melt the plated metal material, the tantalum filament is used to heat and degas the workpiece, and the electron gun is used to enhance the ionization rate. The strength and wear resistance are all good, and it is difficult to remove even by grinding. But these devices are only suitable for TiN coating, or pure metal thin film. For multi-layer coatings or composite coatings, it is not enough, and it is difficult to meet the requirements of high-speed cutting of high-hardness materials and the diversity of mold applications.

At present, some developed countries (such as CemeCon in Germany, ART-TEER in Britain, Platit in Switzerland) use an unbalanced magnetic field to replace the original balanced magnetic field, 50KHz intermediate frequency power supply to replace the original DC power supply, pulse The power supply has replaced the previous DC bias voltage, and the auxiliary anode technology has been adopted, so that the magnetron sputtering technology has gradually matured, and has been applied to the mold coating in large quantities. The coatings that have been stably produced now mainly include TiAlN, AlTiN, TiB2, DLC , CrN, Zhejiang, Guangdong, Jiangsu, Guizhou, Zhuzhou and other places in China have also successively introduced such equipment, which has the potential to spark a prairie fire.

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