The most extensive range of ion sources for vacuum silvered Hall ion sources

The most extensive range of ion sources for vacuum silvered Hall ion sources

The Hall ion source is arguably the most widely used ion source. Advanced ion sources such as Veece's Mark I and Mark II ion sources. Suitable for most ion sources such as domestic ones.

If the titanium is plated with wear-resistant decoration, the thickness of the titanium is large, and the bonding force with the body is required to be strong, and the uniformity requirements are not high. Hall ion source available. The ion current is large, and the ion energy level is also high. If it is coated with optical titanium, the ion current energy level is mainly required to be concentrated, and the ion current uniformity is good. Therefore, it is best to use Kaufman or RF ion source, and ECR (electron cyclotron) or ICP (inductive coupling) ion source can be used if conditions permit. In addition, consumables should also be considered, such as the Hall source of tungsten wire, which will burn out after ten hours in the reaction gas. Advanced ion sources such as ICP ion sources can operate continuously in the reactive gas for hundreds of hours.

The characteristics of vacuum silver ion source are:

1 Briefly used.

2. The ion current is almost proportional to the gas flow, and a larger ion current can be obtained.

3. The tungsten wire generally straddles the outlet, and the ion beam impact will quickly corrode, especially for the reaction gas, which generally needs to be replaced within ten hours. And tungsten wire will have certain pollution. To deal with the shortcomings of tungsten wire. Some use longer life neutralizers, such as a small hollow cathode source.

Vacuum silver-plated Hall ion source

A Hall ion source is an anode that plasmons the process gas in cooperation with a strong axial magnetic field. The strong imbalance of this axial magnetic field separates the gas ions and forms the ion beam. Because the effect of the axial magnetic field is too strong, the Hall ion source ion beam requires compensation electrons to neutralize the ion flow. A common source of neutralization is the tungsten filament (cathode).

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