Vacuum coating machine cooling system

Vacuum coating machine cooling system

The vacuum coating machine is equipped with a vacuum chamber in the middle, and left and right doors on the left and right sides of the vacuum chamber, and equipped with an evaporation device and a magnetron device. The interface of the two devices can be reserved on the double door in case of need Dress up. Vacuum coating machine is generally composed of vacuum system, evaporation system, film winding system, cooling system, control system and other main parts.

Lubricating effect of molybdenum disulfide lubricant in vacuum coating machine

The methods of lubrication in vacuum usually include solid lubricating film plating and direct use of lubricants, which are easy to damage the motion accuracy of the guide rail, and the process is complicated.

To this end, we tested the lubricating effect of a market commodity-molybdenum disulfide lubricant, sprayed the lubricant directly on the surface of the moving pair, and used a quadrupole mass spectrometer to analyze the gas volatilized from the lubricant in the vacuum. main ingredient.

The compensation amount of the vacuum coating machine in the vacuum state is adjusted again

The compensation amount in the vacuum state calculated by the finite element calculation (or measured in the first step) is adjusted again. Obviously, the reflected beam at this time is far away from the receiving field of view of the autocollimator, but once the vacuum chamber enters the vacuum state, the reflected beam is re-adjusted again. Enter the receiving field of view of the autocollimator, and record the two-dimensional angle deviation at this time. The two-dimensional angular deviations displayed before and after are basically consistent.

Lubrication of the moving pair of the worktable and its impact on the vacuum environment The scanning of the worktable is a frequent movement in the vacuum chamber environment. In addition to rolling instead of sliding to reduce the friction coefficient, good Lubrication is a necessary condition to ensure the long-term normal operation of the etching device.

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