Vacuum electroplating machine electron gun shutdown sequence
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Vacuum electroplating machine electron gun shutdown sequence
1) Turn off the high vacuum gauge and the molecular pump.
2) When the molecular pump display reaches 50, turn off the high valve, the front stage, and the mechanical pump in turn, and it will take about 40 minutes during this period.
3) When it is below 50, turn off the maintenance pump again.
Operation of Electron Gun Power Cabinet of Vacuum Electroplating Machine
1) Turn on the main power
2) Turn on the power supply of electron gun control I and electron gun control II at the same time: press the power supply of electron gun control I, the delay switch, the delay, power and protection lights will be on, and the delay and protection lights will be off after three minutes, if the back door is not closed or the water flow relay has If there is a fault, the protection light will always be on.
3) Turn on the high voltage, the high voltage will reach more than 10KV, adjust the beam current to about 200mA, the curtain grid is 20V/100mA, the filament current is 1.2A, and the deflection current swings between 1~1.7.
How to use the vacuum plating machine
1) Turn on the water pump and air source
2) Turn on the main power
3) Turn on the power supply of the maintenance pump and the vacuum gauge, and the position of the vacuum gauge is V1, wait for the value to be less than 10, and then enter the next step. It takes about 5 minutes.
4) Turn on the mechanical pump, pre-pump, turn on the power of the turbo molecular pump, start it, change the switch of the vacuum gauge to the V2 position, and pump it to less than 2, it takes about 20 minutes.
5) After observing that the reading of the turbo molecular pump reaches 250, turn off the vacuum pump, open the front engine and the high valve and continue to vacuumize. After the vacuum reaches a certain level, the high vacuum meter on the right can be opened to observe the vacuum degree. The electron gun power can only be turned on after the vacuum reaches 2×10-3.
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