Design features of multi-chip comparison chip device of vacuum coating machine

Design features of multi-chip comparison chip device of vacuum coating machine

1) The cylindrical shape of the fixed cylinder, the design of the large diameter, the thick-walled structure and the circumferentially symmetrical fixing method can ensure that it has sufficient strength and rigidity, and at the same time, it can also prevent the high temperature sputtering abrasive from contaminating its internal parts, Ensure the flexibility of the dial rotation.

2) The design of the circular bearing seat ensures the sealing and verticality of the bearing seat installation; increase the diameter of the shaft, increase the installation distance between the two bearings in the bearing seat, improve its own strength and rigidity, and ensure the rotation process. The stiffness of axis 1 and the rotational flexibility of the dial, the consistency of position repeatability.

3) Loading the transposition mechanism, by expanding the diameter of the support plate, the effective area of the mechanism in the plane direction is increased, and a comparative film with a large diameter (Φ26.5mm) can be installed, which is conducive to the adjustment of the optical path and improves the quality of the optical film; A single piece of glass is used as a comparison piece unit, and the comparison piece is installed in a three-dimensional space. Multiple pieces of glass are superimposed and installed in a comparison piece storage cylinder, so that 50 to 100 pieces of comparison pieces can be placed at one time, which solves the problem of excessive coating by the coating machine. The number of layers of precision optical films is relatively small, which affects the number of coating layers and the accuracy.

4) The cooperation of the positioning plate and the slot-type optical coupling, through the slot-shaped optical coupling, the three equally divided 120° slits on the positioning plate are sensed, and the motor rotation is controlled to stop. The consistency of the rotation and positioning of the axis 1 is guaranteed, and the dial is driven to complete the accurate pick action.

5) The Wilson sealing mechanism is introduced into the rotary sealing feed-in mechanism, which not only ensures the flexible rotation of the shaft driven by the motor through gear meshing, but also ensures the sealing effect of the vacuum chamber on the outside. The optimized design of the multi-chip comparison device of the vacuum coating machine has the following characteristics: (1) Simple structure, high strength and good reliability; (2) The number of comparison chips is large, the production efficiency is improved, and ultra-multi-layer precision optics can be coated (3) The diameter of the comparative film is increased, the precision of the film monitoring is improved, the requirements for the hardware system are reduced, and the system is easy to realize automatic control;

The uniformity of the chemical composition of the vacuum coating machine:

that is to say, in the film, the atomic composition of the compound will easily have uneven characteristics because the standard is too small. If the SiTiO3 film is unscientific, then the actual composition of the surface will be The fraction is not SiTiO3, but may be other fractions. The coated film is not the chemical composition of the desired film, which is also the technical content of vacuum coating.

The uniformity of the thickness of the vacuum coating machine: it can also be understood as the roughness. In terms of the standard of optical films (that is, 1/10 wavelength as a unit, about 100A), the uniformity of the vacuum coating machine is now quite good. The roughness can be easily manipulated in the range of 1/10 of the wavelength of visible light, which means that the vacuum coating does not hinder any optical properties of the film.

The uniformity of the lattice order of the vacuum coating machine:

This determines whether the film is single crystal, polycrystalline or amorphous, which is a hot issue in vacuum coating technology.

www.superbheater.com