The transmission of the vacuum coating machine adopts magnetic guide to ensure the stability of the transmission.

The transmission of the vacuum coating machine adopts magnetic guide to ensure the stability of the transmission.

1) The material of the vacuum chamber body is SUS304, the inner wall of the vacuum chamber is polished, and the outer wall is polished and then bead-blasted.

2) The vacuum chambers are separated by an independent gate valve - a flapper valve, which can achieve effective separation and stabilize the technical gas. Now our company chooses the flap valve design, which has a very good sealing effect and is more durable than the current domestic common flap valve.

3) The transmission adopts magnetic guide to ensure the stability of the transmission. The speed of each section of the entire production line is driven by variable frequency speed regulation motor, and the running speed can be adjusted.

4) Electrical control system of vacuum electroplating equipment: touch screen and PLC automatic control, man-machine dialogue method to complete the data display, operation and control of the system

Any material can be sputtered on the vacuum coating machine

The current density of normal glow discharge is related to cathode material and shape, gas pressure and so on. It should be kept as stable as possible when sputtering. Any material can be sputtered, even high melting point materials can be easily sputtered, but radio frequency (RF) or pulse (pulse) sputtering is required for non-conductor targets; and due to poor conductivity, sputtering power and speed are relatively high. Low. Metal sputtering power up to 10W/cm2, non-metal <5W/cm2

Vacuum coater etching and coating

The surface of the material is bombarded with charged particles with tens of electron volts or higher kinetic energy, so that it sputters out into the gas phase, which can be used for etching and coating. The number of atoms sputtered by an incident ion is called the sputtering yield. The higher the yield, the faster the sputtering speed. Cu, Au, Ag are the highest, and Ti, Mo, Ta, W are the lowest. Generally 0.1-10 atoms/ion. The ions can generate a DC glow discharge. At a vacuum degree of 10-1-10 Pa, a high voltage is applied between the two poles to generate a discharge. The positive ions will bombard the negatively charged target and sputter the target, and plated until it is plated. on things.

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