The vacuum coating machine cannot reach the working vacuum, recovery vacuum, ultimate vacuum, and vacuum preservation

Aug 03, 2023

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1. There is a lot of dust in the evaporation chamber (should be cleaned)

2. The diffusion pump has not changed the oil for a long time (the oil should be cleaned and changed)

3. The back pressure of the backing pump is too high, and the vacuum degree of the mechanical pump is too low (the oil should be cleaned and changed)

4. Each dynamic sealing rubber ring is damaged (replace the rubber ring)

5. Due to the long-term high temperature of the evaporation chamber, the sealing rubber rings are aged (replace the rubber rings)

6. Whether there is any damage to the rubber ring at the sealing part of the water inlet of the evaporation chamber (replace the rubber ring)

7. Whether the screws and nuts of each lead-in seat are loose (re-tighten)

8. Whether the high and low pre-valve is sealed and reliable (oil filling)

When the vacuum coating machine is coating, the vacuum degree suddenly drops:

1. Evaporation source waterway rubber ring damage ring (replace the rubber ring)

2. The crucible is pierced (replace the crucible)

3. The high-voltage electrode seal is broken down (replace the rubber ring)

4. The rubber ring is damaged at the rotating seal (replace the rubber ring)

5. The sudden closing of the pre-valve may be the damage of the two-position five-way valve (replace the two-position five-way valve)

6. The sudden closing of the high valve may be the damage of the two-position five-way valve (replace the two-position five-way valve)

7. When the mechanical pump stops, the relay may be disconnected (check whether the relay is working properly)

8. Baking lead-in electrode seal is broken down (replace the rubber ring)

9. The rubber ring at the dynamic seal of the baffle is damaged (replace the rubber ring)

10. The glass observation mirror has cracks and bursts (replace the glass)

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